Product overview
The direct-drive rotation stages of the V-62x series are designed for precision, high stiffness, a long lifetime, and ease of use, and can be mounted in any orientation. The V-62x stages offer superior performance regarding travel accuracy, flatness, and wobble. The ultra-precise deep groove ball bearings are preloaded and lubricated prior to delivery, meaning they are maintenance-free for the whole lifetime of the rotation stage.
Direct-drive torque motor
Torque motors are electromagnetic direct drives. They dispense with mechanical components in the drivetrain and transfer the drive force directly and friction-free to the motion platform. The drives reach high velocities and accelerations.
Absolute encoder (optional)
Absolute encoders supply explicit position information that enables immediate determination of the position. Therefore, no referencing is necessary when switching on and this increases efficiency and safety during operation.
Accessories and options
Application fields
Sample inspection. Precision microassembly. Research. Biotechnology. Semiconductor testing and inspection. Measuring technology. Automation technology. Device assembly. Laser micro processing. Sensor calibration and test.
| Motion | V-622.A100 | V-623.A100 | V-625.A100 | V-622.B100 | V-623.B100 | V-625.B100 | Tolerance |
|---|---|---|---|---|---|---|---|
| Active axes | θZ | θZ | θZ | θZ | θZ | θZ | |
| Rotation range in θZ | 360 ° | 360 ° | 360 ° | 360 ° | 360 ° | 360 ° | |
| Maximum angular velocity in θZ, unloaded | 1200 rpm | 1000 rpm | 200 rpm | 1200 rpm | 1000 rpm | 200 rpm | |
| Radial error in X | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | typ. |
| Axial error | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | ± 2 µm | typ. |
| Tilt error around X (wobble) | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | ± 20 µrad | typ. |
| Positioning | V-622.A100 | V-623.A100 | V-625.A100 | V-622.B100 | V-623.B100 | V-625.B100 | Tolerance |
| Positioning accuracy in θZ, calibrated | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | ± 10 µrad | typ. |
| Bidirectional repeatability in θZ | 5 µrad | 5 µrad | 5 µrad | 5 µrad | 5 µrad | 5 µrad | typ. |
| Reference switch | 1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak | 1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak | 1 / revolution, differential pulse over one sensor signal period, 1 V peak-peak | — | — | — | |
| Integrated sensor | Incremental angle-measuring system | Incremental angle-measuring system | Incremental angle-measuring system | Absolute angle-measuring system | Absolute angle-measuring system | Absolute angle-measuring system | |
| Sensor signal | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | Sin/cos, 1 V peak-peak | BiSS-C, 32-bit | BiSS-C, 32-bit | BiSS-C, 32-bit | |
| Sensor signal periods / U | 11840 | 15744 | 31488 | — | — | — | |
| Sensor resolution, rotational | 0.13 µrad | 0.097 µrad | 0.049 µrad | 0.0015 µrad | 0.0015 µrad | 0.0015 µrad | |
| Drive Properties | V-622.A100 | V-623.A100 | V-625.A100 | V-622.B100 | V-623.B100 | V-625.B100 | Tolerance |
| Drive type | Ironless 3-phase torque motor | Ironless 3-phase torque motor | Ironless 3-phase torque motor | Ironless 3-phase torque motor | Ironless 3-phase torque motor | Ironless 3-phase torque motor | |
| Peak voltage | 80 V | 80 V | 80 V | 80 V | 80 V | 80 V | |
| Nominal current, RMS | 4.9 A | 4.6 A | 4.3 A | 4.9 A | 4.6 A | 4.3 A | typ. |
| Peak current, RMS | 13.8 A | 13.8 A | 13.8 A | 13.8 A | 13.8 A | 13.8 A | typ. |
| Drive torque in θZ | 0.57 N·m | 1.4 N·m | 4.1 N·m | 0.57 N·m | 1.4 N·m | 4.1 N·m | |
| Peak torque in θZ | 1.22 N·m | 2.9 N·m | 9.3 N·m | 1.22 N·m | 2.9 N·m | 9.3 N·m | |
| Torque constant | 0.117 N·m/A | 0.3 N·m/A | 0.96 N·m/A | 0.117 N·m/A | 0.3 N·m/A | 0.96 N·m/A | typ. |
| Resistance phase-phase | 1.7 Ω | 2.76 Ω | 4.94 Ω | 1.7 Ω | 2.76 Ω | 4.94 Ω | typ. |
| Inductance phase-phase | 2.7 mH | 5.2 mH | 9.8 mH | 2.7 mH | 5.2 mH | 9.8 mH | |
| Back EMF, phase-phase, rotational | 10 V/kRPM | 25 V/kRPM | 82 V/kRPM | 10 V/kRPM | 25 V/kRPM | 82 V/kRPM | max. |
| Number of pole pairs | 12 | 20 | 36 | 12 | 20 | 36 | |
| Mechanical Properties | V-622.A100 | V-623.A100 | V-625.A100 | V-622.B100 | V-623.B100 | V-625.B100 | Tolerance |
| Permissible push force in X | 50 N | 75 N | 100 N | 50 N | 75 N | 100 N | max. |
| Permissible push force in Y | 50 N | 75 N | 100 N | 50 N | 75 N | 100 N | max. |
| Permissible push force in Z | 100 N | 150 N | 400 N | 100 N | 150 N | 400 N | max. |
| Permissible torque in θX | 5 N·m | 10 N·m | 20 N·m | 5 N·m | 10 N·m | 20 N·m | max. |
| Permissible torque in θY | 5 N·m | 10 N·m | 20 N·m | 5 N·m | 10 N·m | 20 N·m | max. |
| Moment of inertia in θZ, unloaded | 331 kg·mm² | 1188 kg·mm² | 26000 kg·mm² | 331 kg·mm² | 1188 kg·mm² | 26000 kg·mm² | ±20 % |
| Bearing type | Ball bearings | Ball bearings | Ball bearings | Ball bearings | Ball bearings | Ball bearings | |
| Overall mass | 1300 g | 2400 g | 11000 g | 1300 g | 2400 g | 11000 g | ±5 % |
| Material | Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware) | Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware) | Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware) | Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware) | Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware) | Hardcoat aluminum (base body), stainless steel (bearing and mounting hardware) | |
| Aperture diameter | 15 mm | 45 mm | 105 mm | 15 mm | 45 mm | 105 mm | |
| Motion platform diameter | 85 mm | 110 mm | 210 mm | 85 mm | 110 mm | 210 mm | |
| Height | 50 mm | 55 mm | 50 mm | 50 mm | 55 mm | 50 mm | |
| Miscellaneous | V-622.A100 | V-623.A100 | V-625.A100 | V-622.B100 | V-623.B100 | V-625.B100 | Tolerance |
| Operating temperature range | 5 to 50 °C | 5 to 50 °C | 5 to 50 °C | 5 to 50 °C | 5 to 50 °C | 5 to 50 °C | |
| Connector | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | D-sub 9W4 (m) | |
| Sensor connector | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | D-sub 15 (m) | |
| Recommended controllers / drivers | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x | A-81x, A-82x |
Note on the linear and rotational crosstalk: Depending on the quality of the underlying surface, the payload, the orientation and the forces acting on the stage from the outside. Please contact PI for application-specific parameters. The specified values are static (no rotary motion during measuring) and without load.
Note on angular velocity: May be limited by payload imbalance, controller or drive.
Note on sensor resolution for A-62x.Axxx: Assumes a 4096x interpolation. Contact PI for the use of other factors.
Note on positioning accuracy: The specified values are based on error compensation controlled by the controller. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.
Note on permissible push force and permissible torque: The maximum load capacities are mutually exclusive, e.g., the stage can be loaded with the maximum permissible push force in X / Y with the maximum permissible push force in Z with the maximum permissible torque in θX / θY.
At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.
Ask for a free quote on quantities required, prices, and lead times or describe your desired modification.
High-precision rotation stage with direct drive; ironless 3-phase torque motor; 360 ° rotational angle; 85 mm Ø motion platform; 100 N load capacity; 1200 min⁻¹ maximum angular velocity; incremental angle measuring system, 0.13 µrad sensor resolution, rotary, Sin/Cos, 1 V peak-peak
High-precision rotation stage with direct drive; ironless 3-phase torque motor; 360 ° rotational angle; 110 mm Ø motion platform; 150 N load capacity; 1000 min⁻¹ maximum angular velocity; incremental angle measuring system, 0.097 µrad sensor resolution, rotary, Sin/Cos, 1 V peak-peak
High-precision rotation stage with direct drive; ironless 3-phase torque motor; 360 ° rotational angle; 210 mm Ø motion platform; 400 N load capacity; 200 min⁻¹ maximum angular velocity; incremental angle measuring system, 0.049 µrad sensor resolution, rotary, Sin/Cos, 1 V peak-peak
High-precision rotation stage with direct drive; ironless 3-phase torque motor; 360 ° rotational angle; 85 mm Ø motion platform; 100 N load capacity; 1200 min⁻¹ maximum angular velocity; absolute angle measuring system, 0.0015 µrad sensor resolution, rotary, BiSS-C, 32-bit
High-precision rotation stage with direct drive; ironless 3-phase torque motor; 360 ° rotational angle; 110 mm Ø motion platform; 150 N load capacity; 1000 min⁻¹ maximum angular velocity; absolute angle measuring system, 0.0015 µrad sensor resolution, rotary, BiSS-C, 32-bit
High-precision rotation stage with direct drive; ironless 3-phase torque motor; 360 ° rotational angle; 210 mm Ø motion platform; 400 N load capacity; 200 min⁻¹ maximum angular velocity; absolute angle measuring system, 0.0015 µrad sensor resolution, rotary, BiSS-C, 32 bit
