PILine® XY stage; PILine® piezo motor, performance class 1; 22 mm × 22 mm travel range (X × Y); 5 N load capacity; 200 mm/s × 200 mm/s maximum velocity; 2 N drive force; incremental linear encoder; 10 nm sensor resolution; 1.5 m cable length
U-723 PILine® XY Stage
Compact XY Stage with Ultrasonic Piezo Motors
- Fast positioning in 2 axes
- Space-saving and light
- High guiding accuracy
- High sensor resolution of 10 nm
- Self-locking, no heat generation at rest
- Low-noise operation
Precision-class XY stage
PILine® stages are particularly suitable for applications that require fast precision positioning. When switched off, the self-locking drive holds the position of the stage mechanically stable. Energy consumption and heat generation are therefore considerably reduced. Applications with a low duty cycle that are battery-powered or heat-sensitive benefit from these characteristics. The position of the axis is measured by an encoder and an optical reference switch allows reliable repeatable motion. The piezomotor drive principle and its electrical operation are inexpensive and can be customized.
PILine® ultrasonic piezomotors
An integral part of a PILine® ultrasonic piezomotor is a piezo actuator that is preloaded against a movable, guided runner via a coupling element. The piezoceramic actuator is excited to ultrasonic oscillation by a high-frequency AC voltage between 100 and 200 kHz. Deformation of the actuator leads to periodic diagonal motion of the coupling element relative to the runner. The feed created is a few nanometers per cycle; the high frequencies lead to the high velocities. Preloading the piezoceramic actuator against the runner ensures self-locking of the drive when at rest and switched off.
Highly accurate position measuring with incremental linear encoder
Noncontact optical encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.
Application fields
Micromanipulation, automation, biotechnology, sample manipulation, sample positioning, applications with limited space, vacuum applications to 10-6 hPa (optional)
Specifications
Specifications
Motion | U-723.25 | Tolerance |
---|---|---|
Active axes | X Y | |
Travel range in X | 22 mm | |
Travel range in Y | 22 mm | |
Maximum velocity in X | 200 mm/s | |
Maximum velocity in Y | 200 mm/s | |
Pitch (Rotational crosstalk in θX with motion in Y) | ± 750 µrad | typ. |
Pitch (Rotational crosstalk in θY with motion in X) | ± 750 µrad | typ. |
Yaw (Rotational crosstalk in θZ with motion in X) | ± 150 µrad | typ. |
Yaw (Rotational crosstalk in θZ with motion in Y) | ± 150 µrad | typ. |
Positioning | U-723.25 | Tolerance |
Integrated sensor | Incremental linear encoder | |
Bidirectional repeatability in X | ± 0.2 µm | typ. |
Bidirectional repeatability in Y | ± 0.2 µm | typ. |
Minimum incremental motion in X | 0.1 µm | typ. |
Minimum incremental motion in Y | 0.1 µm | typ. |
Sensor resolution | 10 nm | |
Reference switch | Optical | |
Drive Properties | U-723.25 | Tolerance |
Drive type | PILine® piezo motor, performance class 1 | |
Drive force in X | 2 N | typ. |
Antriebskraft in X | 2 N | typ. |
Mechanical Properties | U-723.25 | Tolerance |
Guide | Crossed roller guide | |
Holding force in X, passive | 2 N | min. |
Holding force in Y, passive | 2 N | min. |
Permissible push force in Z | 5 N | max. |
Overall mass | 350 g | ±5 % |
Mass without cable | 110 g | ±5 % |
Material | Aluminum, anodized | |
Miscellaneous | U-723.25 | Tolerance |
Operating temperature range | 0 to 40 °C | |
Connector | 2 × D-sub 15-pin (m) | |
Cable length | 1.5 m | +200/ -0 mm |
Recommended controllers / drivers | C-867.2U2, C-867.10C885 |
Specifications determined with the C-867.2U2 controller.
Quote / Order
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