N-331 PICMAWalk Walking Drive

OEM Walking Drive for Durable Applications with up to 12 mm/s Velocity and 50 N Drive Force

Robust walking drive for industrial use with PICMA® technology for extreme durability
Fastest and strongest drive of its size class
Variable runner lengths from 25 mm to 100 mm
Precise, nanometer precision positioning of loads up to 5 kg
Plug-and-play, thanks to PI proprietary controller technology
Vacuum versions to 10^-9 hPa available

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The N-331 drive reliably performs repeatable 10-nm steps. Measured by an interferometer.

N-331.xx, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.

Application fields

Industrial precision positioning
Semiconductor technology
Semiconductor tests
Wafer inspection
Lithography
Nanoimprinting
Nanometrology

Outstanding lifetime due to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators. 100 billion cycles without a single failure are proven.

Nanometer precision and high feed force with PiezoWalk® walking drives

In the PiezoWalk® walking drive, several piezo actuators do a walking motion that leads to a forward feed of a runner. Control of the actuators allows the smallest step and forward feed motion at a resolution of well under one nanometer.

Highly accurate position measuring with incremental linear encoder

Noncontact optical linear encoders measure the position directly at the platform with the greatest accuracy. Nonlinearity, mechanical play or elastic deformation have no influence on the measurement.

Download datasheet 사양 보기

Datasheet

버전 / 날짜

2023-12-11

pdf - 799 KB

버전 / 날짜

2023-12-11

pdf - 801 KB

버전 / 날짜

2018-10-16

pdf - 791 KB

다운로드

Select a travel range:

Motion	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
Active axes	X	X	X	X	X	X
Travel range in X	—	25 mm	—	50 mm	—	100 mm
Travel range in X, open loop	30 mm	30 mm	55 mm	55 mm	105 mm	105 mm	±0,5 mm
Travel range in X (analog mode)	20 µm	20 µm	20 µm	20 µm	20 µm	20 µm	typ.
Operating frequency in full step mode	0.6 kHz	0.6 kHz	0.6 kHz	0.6 kHz	0.6 kHz	0.6 kHz
Velocity (100% duty cycle, full-step mode)	12 mm/s	12 mm/s	12 mm/s	12 mm/s	12 mm/s	12 mm/s	max.
Velocity (100% duty cycle, nanostepping mode)	10 mm/s	10 mm/s	10 mm/s	10 mm/s	10 mm/s	10 mm/s	max.
Positioning	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
Minimum incremental motion in X	0.01 µm	0.01 µm	0.01 µm	0.01 µm	0.01 µm	0.01 µm	typ.
Resolution in X, open loop	0.02 nm	0.02 nm	0.02 nm	0.02 nm	0.02 nm	0.02 nm	typ.
Integrated sensor	—	Incremental linear encoder	—	Incremental linear encoder	—	Incremental linear encoder
System resolution in X	—	10 nm	—	10 nm	—	10 nm
Drive Properties	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
Drive type	PICMAWalk	PICMAWalk	PICMAWalk	PICMAWalk	PICMAWalk	PICMAWalk
Operating voltage	-20 to 120 V	-20 to 120 V	-20 to 120 V	-20 to 120 V	-20 to 120 V	-20 to 120 V
Drive force in positive direction of motion in X	50 N	50 N	50 N	50 N	50 N	50 N	min.
Drive force in negative direction of motion in X	50 N	50 N	50 N	50 N	50 N	50 N	min.
Mechanical Properties	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
Holding force in X, passive	60 N	60 N	60 N	60 N	60 N	60 N	min.
Moved mass in X, unloaded	110 g	110 g	140 g	140 g	190 g	190 g
Overall mass	580 g	580 g	610 g	610 g	660 g	660 g
Material	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel	Aluminum, stainless steel
Endurance at 1013 hPa, 2 kg payload, 70% duty cycle	> 30 km	> 30 km	> 30 km	> 30 km	> 30 km	> 30 km
Miscellaneous	N-331.10	N-331.13	N-331.20	N-331.23	N-331.40	N-331.43	Tolerance
Operating temperature range	0 to 50 °C	0 to 50 °C	0 to 50 °C	0 to 50 °C	0 to 50 °C	0 to 50 °C
Connector	D-sub 37 (m)	D-sub 37 (m)	D-sub 37 (m)	D-sub 37 (m)	D-sub 37 (m)	D-sub 37 (m)
Cable length	2 m	2 m	2 m	2 m	2 m	2 m
Recommended controllers / drivers	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN	E-712.1AN • E-712.2AN • E-712.3AN

Travel range in X, open loop: From one mechanical hard stop of the runner to the other mechanical hard stop, only in open-loop operation

Velocity (100 % duty cycle, full-step mode): depends on the controller, the load, and the servo parameters: in this case an E-712.AN controller is used. For longer positioning processes, operate the linear actuator with this controller at a velocity below 3 mm/s.

Operating frequency in full-step mode: when operated with a digital controller with 25 W peak power output

All specifications based on room temperature (22 °C ±3 °C).

At PI, technical data is specified at 22 ±3 °C. Unless otherwise stated, the values are for unloaded conditions. Some properties are interdependent. The designation "typ." indicates a statistical average for a property; it does not indicate a guaranteed value for every product supplied. During the final inspection of a product, only selected properties are analyzed, not all. Please note that some product characteristics may deteriorate with increasing operating time.

Download datasheet 다운로드 가기

Datasheet

버전 / 날짜

2023-12-11

pdf - 799 KB

버전 / 날짜

2023-12-11

pdf - 801 KB

버전 / 날짜

2018-10-16

pdf - 791 KB

다운로드