D-050 • D-100 Capacitive Sensors

D-050 • D-100 Capacitive Sensors

Subnanometer-Resolution Position Sensors

  • For applications with the highest precision requirements
  • Measuring range to 300 µm
  • Resolution to 0.01 nm
  • Linearity error to 0.01% with digital controller
  • E-509.CxA control electronics, compatible with E-500 piezo controller system
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Motion of a piezo nanopositioning system with 0.3 nm steps, measured with a capacitive sensor from PI (lower curve) and with a highly accurate laser interferometer (model Zygo ZMI 2000, upper curve). The capacitive sensor shows a significantly higher resolution than the interferometer.
D-050.00, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
D-100.00, dimensions in mm. Note that a comma is used in the drawings instead of a decimal point.
D-050 • D-100 Capacitive Sensors
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Resolution

Capacitive sensors achieve resolutions into the picometer range over shorter distances. The theoretical measuring resolution is unlimited. In practice, scatter radiation, geometrical effects, and the measuring electronics noise influence the achievable accuracy. In conjunction with the E-509.C1A electronics, the effective noise factor of the D-100.00 sensors (100 µm) is 0.02 nm/√Hz. Corresponds for example, to a resolution of 0.2 nm with 100 Hz bandwidth. The jumper-adjustable bandwidth of the electronics is up to 3 kHz.

In addition to the standard sensors listed here, PI offers customized versions, e.g., in measuring, geometry, material, electronics etc.

Application fields

High-precision positioning.

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Specifications

Datasheet

Datasheet D-050 • D-100

버전 / 날짜
2022-08-31
pdf - 517 KB
버전 / 날짜
2022-08-31
pdf - 519 KB
버전 / 날짜
2018-06-18
pdf - 860 KB
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Downloads

Product Note

Product Note

Product Change Notification D-015

버전 / 날짜
2021-12-20
pdf - 111 KB
영어
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Datasheet

Datasheet

Datasheet D-050 • D-100

버전 / 날짜
2022-08-31
pdf - 517 KB
버전 / 날짜
2022-08-31
pdf - 519 KB
버전 / 날짜
2018-06-18
pdf - 860 KB
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Documentation

Documentation

User Manual PZ106

D-015, D-050, D-100 Capacitive Sensors

버전 / 날짜
2003-11-05
pdf - 228 KB
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Quote / Order

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0082 2 475 0060info-kr@pi.ws
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Compatible Electronics Related Products
E-509 Signal Conditioner / Piezo Servo Module